"Capacitance response of concave well substrate touch-mode capacitive ..."

Myongchol Kang, Chan Ri, Jonghuan Choe (2021)

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DOI: 10.1016/J.MEJO.2021.105118

access: closed

type: Journal Article

metadata version: 2021-08-26

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Myongchol Kang, Chan Ri, Jonghuan Choe:
Capacitance response of concave well substrate touch-mode capacitive pressure sensor: Mathematical analysis and simulation. Microelectron. J. 114: 105118 (2021)

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