"On the SRAM with comb-shaped nano FETs advancing to 3 nm node and beyond."

Xinhao Li et al. (2023)

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DOI: 10.1016/J.MEJO.2023.105842

access: closed

type: Journal Article

metadata version: 2023-11-12

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Xinhao Li, Huilong Zhu, Zhenzhen Kong, Qi Wang, Yongkui Zhang, Zhenhua Wu:
On the SRAM with comb-shaped nano FETs advancing to 3 nm node and beyond. Microelectron. J. 138: 105842 (2023)

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