BibTeX record journals/mj/LvSF08

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@article{DBLP:journals/mj/LvSF08,
  author    = {Shi{-}Long Lv and
               Zhi{-}Tang Song and
               Song{-}Lin Feng},
  title     = {Fabrication of arrays of line with nanoscale width and large length
               by electron beam lithography with high-precision stage},
  journal   = {Microelectron. J.},
  volume    = {39},
  number    = {9},
  pages     = {1126--1129},
  year      = {2008},
  url       = {https://doi.org/10.1016/j.mejo.2008.01.080},
  doi       = {10.1016/j.mejo.2008.01.080},
  timestamp = {Sat, 22 Feb 2020 19:34:52 +0100},
  biburl    = {https://dblp.org/rec/journals/mj/LvSF08.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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