"Electrical equivalent modeling of MEMS differential capacitive accelerometer."

Ravindra Mukhiya et al. (2020)

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DOI: 10.1016/J.MEJO.2020.104770

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type: Journal Article

metadata version: 2024-10-06

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Ravindra Mukhiya, M. Garg, P. Gaikwad, Soumendu Sinha, A. K. Singh, R. Gopal:
Electrical equivalent modeling of MEMS differential capacitive accelerometer. Microelectron. J. 99: 104770 (2020)

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