"Structure design and optimization of SOI high-temperature pressure sensor ..."

Xin Tang et al. (2021)

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DOI: 10.1016/J.MEJO.2021.105245

access: closed

type: Journal Article

metadata version: 2021-12-15

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Xin Tang, Junwang Tian, Jiafeng Zhao, Zhong Jin, Yunpeng Liu, Junfu Liu, Taotao Chen, Junhui Li:
Structure design and optimization of SOI high-temperature pressure sensor chip. Microelectron. J. 118: 105245 (2021)

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