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"Investigation on LIGA-like process based on multilevel imprint lithography."

Quandai Wang et al. (2009)

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DOI: 10.1016/J.MEJO.2008.06.086

access: closed

type: Journal Article

metadata version: 2023-09-30

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  - https://dblp.org/rec/journals/mj/WangDDLXY09
Quandai Wang, Yugang Duan, Yucheng Ding, Bingheng Lu, Jiawei Xiang, Lianfa Yang:
Investigation on LIGA-like process based on multilevel imprint lithography. Microelectron. J. 40(1): 149-155 (2009)

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