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"Improving hydrogenation efficiency of polycrystalline silicon thin film ..."
Xiangbin Zeng, X. W. Sun, Johnny K. O. Sin (2003)
- Xiangbin Zeng, X. W. Sun, Johnny K. O. Sin:
Improving hydrogenation efficiency of polycrystalline silicon thin film transistors by a new approach. Microelectron. J. 34(11): 1079-1085 (2003)
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