"Exploring thermal effects of advanced backside power delivery network ..."

Haoyu Zhang et al. (2024)

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DOI: 10.1016/J.MEJO.2024.106440

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type: Journal Article

metadata version: 2024-11-30

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Haoyu Zhang, Linlin Cai, Haifeng Chen, Binyu Yin, Wangyong Chen:
Exploring thermal effects of advanced backside power delivery network beyond 3 nm node. Microelectron. J. 153: 106440 (2024)

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