"On-chip integrated 0.4 GHz & 2.3 GHz Lamb wave resonators: Electrode ..."

Jicong Zhao et al. (2025)

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DOI: 10.1016/J.MEJO.2025.106751

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type: Journal Article

metadata version: 2025-07-16

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Jicong Zhao, Qiner Xu, Shitao Lv, Wenhao Ye, Qiang Xu, Yi Cao, Haiyan Sun, Jing Huang:
On-chip integrated 0.4 GHz & 2.3 GHz Lamb wave resonators: Electrode structure optimization and flip-transfer fabrication. Microelectron. J. 162: 106751 (2025)

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