"Study of electrode structures for 5.89 GHz A1 mode Lamb wave resonators to ..."

Jicong Zhao et al. (2023)

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DOI: 10.1016/J.MEJO.2023.106007

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type: Journal Article

metadata version: 2024-01-02

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Jicong Zhao, Aoyu Zhang, Xinyi Sun, Yanmeng Dang, Yi Cao, Haiyan Sun, Quan Shi:
Study of electrode structures for 5.89 GHz A1 mode Lamb wave resonators to achieve f_s×k_t²×Q > 247×10⁹ Hz. Microelectron. J. 142: 106007 (2023)

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