"Thermal laser stimulation and NB-OBIC techniques applied to ESD defect ..."

Thomas Beauchêne et al. (2003)

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DOI: 10.1016/S0026-2714(02)00339-6

access: closed

type: Journal Article

metadata version: 2021-01-20

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Thomas Beauchêne, Dean Lewis, Felix Beaudoin, Vincent Pouget, Romain Desplats, Pascal Fouillat, Philippe Perdu, Marise Bafleur, David Trémouilles:
Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization. Microelectron. Reliab. 43(3): 439-444 (2003)

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