"Measuring time-dependent deformations in metallic MEMS."

L. I. J. C. Bergers et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.03.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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L. I. J. C. Bergers, J. P. M. Hoefnagels, N. K. R. Delhey, Marc G. D. Geers:
Measuring time-dependent deformations in metallic MEMS. Microelectron. Reliab. 51(6): 1054-1059 (2011)

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