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"Intermittent-contact scanning capacitance microscopy versus contact mode ..."
Roland Biberger et al. (2008)
- Roland Biberger, Guenther Benstetter
, Thomas Schweinböck, Peter Breitschopf, Holger Goebel
:
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48(8-9): 1339-1342 (2008)
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