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"Intermittent-contact scanning capacitance microscopy versus contact mode ..."

Roland Biberger et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.06.013

access: closed

type: Journal Article

metadata version: 2022-12-07

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Roland Biberger, Guenther Benstetter, Thomas Schweinböck, Peter Breitschopf, Holger Goebel:
Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectron. Reliab. 48(8-9): 1339-1342 (2008)

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