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"Charging mechanisms in Y2O3 dielectric films for ..."

Dimitrios Birmpiliotis et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.07.087

access: closed

type: Journal Article

metadata version: 2022-10-02

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Dimitrios Birmpiliotis, Matroni Koutsoureli, J. Kohylas, George J. Papaioannou, A. Ziaei:
Charging mechanisms in Y₂O₃ dielectric films for MEMS capacitive switches. Microelectron. Reliab. 88-90: 840-845 (2018)

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