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"Review of add-on process modules for high-frequency silicon technology."

Joachim N. Burghartz (2005)

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DOI: 10.1016/J.MICROREL.2004.12.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Joachim N. Burghartz:
Review of add-on process modules for high-frequency silicon technology. Microelectron. Reliab. 45(3-4): 409-418 (2005)

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