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"Impact of Hf content on positive bias temperature instability reliability ..."
H. W. Chen, Chuan-Hsi Liu (2010)
- H. W. Chen, Chuan-Hsi Liu:
Impact of Hf content on positive bias temperature instability reliability of HfSiON gate dielectrics. Microelectron. Reliab. 50(5): 614-617 (2010)
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