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"Development of a capacitive sensing technology for the measurement of ..."

Shun-Tong Chen, Sheng-min Lin (2018)

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DOI: 10.1016/J.MICROREL.2017.03.029

access: closed

type: Journal Article

metadata version: 2023-09-30

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Shun-Tong Chen, Sheng-min Lin:
Development of a capacitive sensing technology for the measurement of perpendicularity in the narrow, deep slot-walls of micromolds. Microelectron. Reliab. 83: 216-222 (2018)

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