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"Local deep level transient spectroscopy using super-higher-order scanning ..."

Norimich Chinone et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.088

access: closed

type: Journal Article

metadata version: 2022-10-02

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Norimich Chinone, Ryoji Kosugi, Yasunori Tanaka, Shinsuke Harada, Hajime Okumura, Yasuo Cho:
Local deep level transient spectroscopy using super-higher-order scanning nonlinear dielectric microscopy. Microelectron. Reliab. 64: 566-569 (2016)

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