"Potential remedies for the VT/Vfb-shift problem of ..."

W. Deweerd et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.048

access: closed

type: Journal Article

metadata version: 2020-02-22

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W. Deweerd, Vidya Kaushik, J. Chen, Y. Shimamoto, Tom Schram, L.-Å. Ragnarsson, Annelies Delabie, Luigi Pantisano, B. Eyckens, J. W. Maes:
Potential remedies for the V_T/V_fb-shift problem of Hf/polysilicon-based gate stacks: a solution-based survey. Microelectron. Reliab. 45(5-6): 786-789 (2005)

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