"Electrical characterization of crystalline Gd2O3 ..."

Ralf Endres, Yordan Stefanov, Udo Schwalke (2007)

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DOI: 10.1016/J.MICROREL.2007.01.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ralf Endres, Yordan Stefanov, Udo Schwalke:
Electrical characterization of crystalline Gd₂O₃ gate dielectric MOSFETs fabricated by damascene metal gate technology. Microelectron. Reliab. 47(4-5): 528-531 (2007)

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