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"Performance improvement of Si-CCD detector based backside reflected light ..."
Arkadiusz Glowacki, Christian Boit, Philippe Perdu (2011)
- Arkadiusz Glowacki, Christian Boit, Philippe Perdu:
Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning. Microelectron. Reliab. 51(9-11): 1632-1636 (2011)
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