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"Performance improvement of Si-CCD detector based backside reflected light ..."

Arkadiusz Glowacki, Christian Boit, Philippe Perdu (2011)

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DOI: 10.1016/J.MICROREL.2011.06.044

access: closed

type: Journal Article

metadata version: 2020-02-22

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Arkadiusz Glowacki, Christian Boit, Philippe Perdu:
Performance improvement of Si-CCD detector based backside reflected light and photon emission microscopy by FIB ultimate substrate thinning. Microelectron. Reliab. 51(9-11): 1632-1636 (2011)

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