BibTeX record journals/mr/GondaJETZ07

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@article{DBLP:journals/mr/GondaJETZ07,
  author    = {Viktor Gonda and
               Kaspar M. B. Jansen and
               Leo J. Ernst and
               Jaap M. J. den Toonder and
               G. Q. Zhang},
  title     = {Micro-mechanical testing of SiLK by nanoindentation and substrate
               curvature techniques},
  journal   = {Microelectron. Reliab.},
  volume    = {47},
  number    = {2-3},
  pages     = {248--251},
  year      = {2007},
  url       = {https://doi.org/10.1016/j.microrel.2006.09.033},
  doi       = {10.1016/j.microrel.2006.09.033},
  timestamp = {Sat, 22 Feb 2020 19:29:14 +0100},
  biburl    = {https://dblp.org/rec/journals/mr/GondaJETZ07.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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