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"Induced charging phenomena on SiNx dielectric films used in RF ..."

Matroni Koutsoureli et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.007

access: closed

type: Journal Article

metadata version: 2022-10-02

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Matroni Koutsoureli, Loukas Michalas, E. Papandreou, George J. Papaioannou:
Induced charging phenomena on SiN_x dielectric films used in RF MEMS capacitive switches. Microelectron. Reliab. 55(9-10): 1911-1915 (2015)

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