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"UHV CAFM characterization of high-k dielectrics: Effect of the technique ..."
Mario Lanza et al. (2010)
- Mario Lanza, Marc Porti
, Montserrat Nafría
, Xavier Aymerich
, E. Whittaker, B. Hamilton:
UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements. Microelectron. Reliab. 50(9-11): 1312-1315 (2010)
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