"Study of glass frit induced stiction using a micromirror array."

Fangzhou Ling et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.009

access: closed

type: Journal Article

metadata version: 2022-02-04

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Fangzhou Ling, Jeroen De Coster, Ann Witvrouw, Jean-Pierre Celis, Ingrid De Wolf:
Study of glass frit induced stiction using a micromirror array. Microelectron. Reliab. 52(9-10): 2256-2260 (2012)

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