"Deformation analysis in microstructures and micro-devices."

Zhanwei Liu et al. (2007)

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DOI: 10.1016/J.MICROREL.2006.11.019

access: closed

type: Journal Article

metadata version: 2021-10-14

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Zhanwei Liu, Huimin Xie, Daining Fang, Changzhi Gu, Yonggang Meng, Weining Wang, Yan Fang, Jianmin Miao:
Deformation analysis in microstructures and micro-devices. Microelectron. Reliab. 47(12): 2226-2230 (2007)

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