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"Focused high- and low-energy ion milling for TEM specimen preparation."

Andriy Lotnyk et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.07.005

access: closed

type: Journal Article

metadata version: 2024-06-04

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  - https://dblp.org/rec/journals/mr/LotnykPRGFBTR15
Andriy Lotnyk, D. Poppitz, U. Ross, J. W. Gerlach, Frank Frost, S. Bernütz, E. Thelander, B. Rauschenbach:
Focused high- and low-energy ion milling for TEM specimen preparation. Microelectron. Reliab. 55(9-10): 2119-2125 (2015)

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