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"Tuneable electrical properties of hafnium aluminate gate dielectrics ..."
Y. Lu et al. (2007)
- Y. Lu, Octavian Buiu
, Steve Hall, Ivona Z. Mitrovic
, W. Davey, R. J. Potter, Paul R. Chalker
:
Tuneable electrical properties of hafnium aluminate gate dielectrics deposited by metal organic chemical vapour deposition. Microelectron. Reliab. 47(4-5): 722-725 (2007)
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