BibTeX record journals/mr/LuRSYKBUG12

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  author    = {Yang Lu and
               E. Ramsay and
               C. R. Stockbridge and
               A. Yurt and
               F. H. K{\"{o}}kl{\"{u}} and
               T. G. Bifano and
               M. S. {\"{U}}nl{\"{u}} and
               Bennett B. Goldberg},
  title     = {Spherical aberration correction in aplanatic solid immersion lens
               imaging using a {MEMS} deformable mirror},
  journal   = {Microelectron. Reliab.},
  volume    = {52},
  number    = {9-10},
  pages     = {2120--2122},
  year      = {2012}
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