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"Reliability of gate dielectrics and metal-insulator-metal capacitors."

Andreas Martin (2005)

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DOI: 10.1016/J.MICROREL.2004.11.036

access: closed

type: Journal Article

metadata version: 2021-02-11

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Andreas Martin:
Reliability of gate dielectrics and metal-insulator-metal capacitors. Microelectron. Reliab. 45(5-6): 834-840 (2005)

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