"Electrical characterisation and reliability of HfO2 and ..."

F. Mondon, S. Blonkowski (2003)

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DOI: 10.1016/S0026-2714(03)00181-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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F. Mondon, S. Blonkowski:
Electrical characterisation and reliability of HfO₂ and Al₂O₃-HfO₂ MIM capacitors. Microelectron. Reliab. 43(8): 1259-1266 (2003)

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