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"Effects of the compositional ratios of sputtering target on the device ..."

Hee Pyung Park et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.052

access: closed

type: Journal Article

metadata version: 2022-04-20

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Hee Pyung Park, Sang Woo Kim, Joong-Won Shin, Won-Ju Cho, Jong Tae Park:
Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors. Microelectron. Reliab. 88-90: 873-877 (2018)

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