"Oxide conductivity increase during the progressive-breakdown of SiO2 gate ..."

Marc Porti, Montserrat Nafría, Xavier Aymerich (2003)

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DOI: 10.1016/S0026-2714(03)00266-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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Marc Porti, Montserrat Nafría, Xavier Aymerich:
Oxide conductivity increase during the progressive-breakdown of SiO2 gate oxides observed with C-AFM. Microelectron. Reliab. 43(9-11): 1501-1505 (2003)

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