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"TEM sample preparation of a SEM cross section using electron beam induced ..."

Emanuela Ricci, F. Cazzaniga, S. Testai (2015)

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DOI: 10.1016/J.MICROREL.2015.07.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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Emanuela Ricci, F. Cazzaniga, S. Testai:
TEM sample preparation of a SEM cross section using electron beam induced deposition of carbon. Microelectron. Reliab. 55(9-10): 2126-2130 (2015)

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