"Accurate extraction of the mechanical properties of thin films by ..."

Yuji Sasaki et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.119

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yuji Sasaki, Mauro Ciappa, Takayuki Masunaga, Wolfgang Fichtner:
Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS. Microelectron. Reliab. 50(9-11): 1621-1625 (2010)

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