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"Assessment of dielectric charging in electrostatically driven MEMS ..."
Usama Zaghloul et al. (2010)
- Usama Zaghloul, Matroni Koutsoureli, H. Wang, Fabio Coccetti, George J. Papaioannou
, Patrick Pons
, Robert Plana:
Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques. Microelectron. Reliab. 50(9-11): 1615-1620 (2010)
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