"Comprehensive 2D-carrier profiling of low-doping region by ..."

Li Zhang et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.142

access: closed

type: Journal Article

metadata version: 2020-11-12

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Li Zhang, Mitsuo Koike, Mizuki Ono, Shogo Itai, Kazuya Matsuzawa, Syotaro Ono, Wataru Saito, Masakazu Yamaguchi, Yohei Hayase, Keiryo Hara:
Comprehensive 2D-carrier profiling of low-doping region by high-sensitivity scanning spreading resistance microscopy (SSRM) for power device applications. Microelectron. Reliab. 55(9-10): 1559-1563 (2015)

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