"Electrostatic micromotor and its reliability."

Wenming Zhang, Guang Meng, Hongguang Li (2005)

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DOI: 10.1016/J.MICROREL.2004.12.017

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wenming Zhang, Guang Meng, Hongguang Li:
Electrostatic micromotor and its reliability. Microelectron. Reliab. 45(7-8): 1230-1242 (2005)

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