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"DRL-dEWMA: a composite framework for run-to-run control in the ..."

Zhu Ma, Tianhong Pan (2024)

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DOI: 10.1007/S00521-023-09112-9

access: closed

type: Journal Article

metadata version: 2024-01-26

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Zhu Ma, Tianhong Pan:
DRL-dEWMA: a composite framework for run-to-run control in the semiconductor manufacturing process. Neural Comput. Appl. 36(3): 1429-1447 (2024)

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