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"Technology challenges for integration near and below 0.1 μm."

Shojiro Asai, Yasuo Wada (1997)

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DOI: 10.1109/5.573738

access: closed

type: Journal Article

metadata version: 2022-04-04

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Shojiro Asai, Yasuo Wada:
Technology challenges for integration near and below 0.1 μm. Proc. IEEE 85(4): 505-520 (1997)

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