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"Bulk micromachining of silicon."

Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen (1998)

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DOI: 10.1109/5.704259

access: closed

type: Journal Article

metadata version: 2022-03-16

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  - journals/pieee/KovacsMP98
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Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen:
Bulk micromachining of silicon. Proc. IEEE 86(8): 1536-1551 (1998)

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