"UHV/CVD growth of Si and Si: Ge alloys: chemistry, physics, and device ..."

Bernard S. Meyerson (1992)

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DOI: 10.1109/5.168668

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type: Journal Article

metadata version: 2022-06-16

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Bernard S. Meyerson:
UHV/CVD growth of Si and Si: Ge alloys: chemistry, physics, and device applications. Proc. IEEE 80(10): 1592-1608 (1992)

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