"Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide ..."

Wesley D. Sacher et al. (2018)

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DOI: 10.1109/JPROC.2018.2860994

access: open

type: Journal Article

metadata version: 2025-01-19

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Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, Jason C. C. Mak, Zheng Yong, Xianshu Luo, Yu Li, Patrick Dumais, Jia Jiang, Dominic J. Goodwill, Eric Bernier, Patrick Guo-Qiang Lo, Joyce K. S. Poon:
Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices. Proc. IEEE 106(12): 2232-2245 (2018)

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