"Automated inspection of IC wafer contamination."

Reza Aghaeizadeh Zoroofi et al. (2001)

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DOI: 10.1016/S0031-3203(00)00070-4

access: closed

type: Journal Article

metadata version: 2020-02-24

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Reza Aghaeizadeh Zoroofi, Hisashi Taketani, Shinichi Tamura, Yoshinobu Sato, Kazuma Sekiya:
Automated inspection of IC wafer contamination. Pattern Recognit. 34(6): 1307-1317 (2001)

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