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"Integrated design, fabrication, and experimental study of a parallel ..."

Xiaoqing Sun et al. (2020)

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DOI: 10.1016/J.RCIM.2020.101988

access: closed

type: Journal Article

metadata version: 2021-07-16

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Xiaoqing Sun, Bintang Yang, Yulong Gao, Yikun Yang:
Integrated design, fabrication, and experimental study of a parallel micro-nano positioning-vibration isolation stage. Robotics Comput. Integr. Manuf. 66: 101988 (2020)

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