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"Uncertainty in microscale gas damping: Implications on dynamics of ..."

Alina A. Alexeenko et al. (2011)

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DOI: 10.1016/J.RESS.2011.01.002

access: closed

type: Journal Article

metadata version: 2021-02-19

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  - journals/ress/AlexeenkoCZGKP11
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  - https://dblp.org/rec/journals/ress/AlexeenkoCZGKP11
Alina A. Alexeenko, Sruti Chigullapalli, Juan Zeng, Xiaohui Guo, Andrew Kovacs, Dimitrios Peroulis:
Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches. Reliab. Eng. Syst. Saf. 96(9): 1171-1183 (2011)

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