"Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in ..."

Claudio Abels et al. (2017)

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DOI: 10.3390/S17051080

access: open

type: Journal Article

metadata version: 2024-06-18

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Claudio Abels, Vincenzo Mariano Mastronardi, Francesco Guido, Tommaso Dattoma, Antonio Qualtieri, William M. Megill, Massimo de Vittorio, Francesco Rizzi:
Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics. Sensors 17(5): 1080 (2017)

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