"Impact of Solid Materials in the Gap Space between Driving Electrodes in a ..."

Mehdi Allameh, Byoungyoul Park, Cyrus Shafai (2024)

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DOI: 10.3390/S24092743

access: open

type: Journal Article

metadata version: 2024-06-18

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Mehdi Allameh, Byoungyoul Park, Cyrus Shafai:
Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator. Sensors 24(9): 2743 (2024)

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