"Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in ..."

Umberto Amato et al. (2023)

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DOI: 10.3390/S23146249

access: open

type: Journal Article

metadata version: 2023-08-31

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Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez:
Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. Sensors 23(14): 6249 (2023)

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