"Measurement of In-Plane Motions in MEMS."

Mohamed Arabi et al. (2020)

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DOI: 10.3390/S20123594

access: open

type: Journal Article

metadata version: 2023-09-30

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Mohamed Arabi, Mary Gopanchuk, Eihab M. Abdel-Rahman, Mustafa Yavuz:
Measurement of In-Plane Motions in MEMS. Sensors 20(12): 3594 (2020)

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